Review of semiconductor technologies. Structural characterization. X-ray diffraction(XRD), low energy electron diffraction(LEED), reflective diffraction of high-energy electrons (Rheede), atomic for cemicroscopy(AFM), scanning tunneling microscopy(STM), scanning electron microscopy(SEM), transmission electron microscopy(TEM), spectroscopy with feedback Rutherford scattering(RBS), energy dispersive X-ray analysis (EDX), Aug erelectron spectroscopy(AES) spectroscopy based on electron energyloss (EELS), mass spectroscopy emission of secondary ions (SIMS), photoelectron spectroscopy based on X-ray(XPS). Electrica lcharacterization: measurement of resistance, Hall effect measurement, measurement o fcurrent-voltage and capacitive-voltage characteristics, deep transient spectroscopy(DLTS). Optical characterization. The optical transmittance, ellipsometry, photoluminescence, Raman spectroscopy, infrared spectroscopy with Fourier transformation.